Eligibility of MEMS Accelerometer As Velocitymeter

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

MEMS Accelerometer Readout

You work in a characterization laboratory af a MEMS company, and you have to design an electronic board in order to test a given capacitive accelerometer. The application of the sensor is vibration monitoring on a mechanical engine in a specific frequency range (from 40 Hz to 400 Hz). The MEMS device has a mass of 8nK g , a mechanical stiffness of 5N /m and a quality factor Q = 2. The capacitiv...

متن کامل

A Modular Mems Accelerometer Concept

Presently, main applications can be found in the automotive market segment (e.g. front and side airbag sensors, ESP respectively chassis stabilization, active suspension, roll over detection). However, low-g sensors enter also new application areas like inclinometry and vibration sensing for instance for anti-theft devices or activity monitoring for pacemaker control. Like in the microelectroni...

متن کامل

Design Optimization of MEMS Comb Accelerometer

MEMS (Microelectromechanical Systems) refers to the technology integrating electrical and mechanical components with feature size of 1~1000 microns. MEMS comb accelerometers have been successfully applied for air-bag deployment systems in automobiles. In this paper, the design optimization of a polysilicon surface-micromachined MEMS comb accelerometer is discussed. The device uses folded-beam s...

متن کامل

Analysis of MEMS Accelerometer for Optimized Sensitivity

Sensitivity is an important element of a sensing process, and it is part of the open-loop gain of the sensor. This makes it a strong inverse relationship between sensitivity and bandwidth for any class of sensors. The geometrical of the accelerometer, mass width, beam (length and width) of the device and its sensitivity are analyzed theoretically and also using finite element analysis software,...

متن کامل

MEMS Manufacturing Testing: An Accelerometer Case Study

Electrical testing of MicroElectroMechanical Systems (MEMS) can take on many different forms including wafer probing, electrical trimming, final test at temperatures, engineering characterization, and reliability evaluations. MEMS testing has had limited visibility in literature from companies that have successfully industrialized applications such as pressure sensors and accelerometers. This l...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Natural B

سال: 2015

ISSN: 2088-4613,2088-4613

DOI: 10.21776/ub.natural-b.2015.003.01.8